E04100 - SEMI E41 - Exception Management (EM) Standard Revision:SEMI E41-95 - Inactive For layers with thicknesses between

For layers with thicknesses between 1 µm and 25 µm

or customers at incoming inspection

and resultant particle size and count are addressed in this Guide

1-1020 (Reapproved 1025) — Specification for TCP/IP Interface for Production Equipment Smart Connection Interface (PESCI)

E04100 - SEMI E41 - Exception Management (EM) Standard Revision:SEMI E41-95 - Inactive For layers with thicknesses betweenInteractive exception handling enhances the error recovery ability while maintaining automated control in the factory. This standard addresses the communications needs within the semiconductor manufacturing environment with respect to equipment exception handling. This standard specifies capabilities to be provided by the exception agent for effective reporting and interaction with respect to abnormal situations in the equipment. It describes the